Measurement Range:2 to 200amu, Resolution(M/deltaM):1M(10%P.H.), Sensitivity(A/Pa):5E-3, Minimum detection partial pressure(Pa):10E-11, Maximum working pressure(Pa):1E-2, Filament:Ir/Y2O3, Emission Current(nA):0.5, Amplitude Range(A f.s.):1E-5 to 1E-12, Detector:Secondary electron multiplier type,
Control Unit; PC Inter Face:RS-232C,/RS485, Output Connector:Analog Input(0 to 10V), Partial pressure set point output*2,,Total pressure set point output*1,Inter lock, Utility:DC24V,2A,
Differencial Exhaust system; Maximum Sampling Pressure(kPa):1.3, Ultimate pressure(Pa):5E-6,
Maker Price:JPY2,160,000
動作未確認 PC画面暗い
Manual,AC Adapter,Sensor Cable,Moduler Cable,Moduler Connector,Spana,Lench,Hex bolt,CD-ROM(QCS2001Ver1.25 Qms Control system),Control PC
)
)
)
)